Impact of strain on ESD robustness of FinFET devices

Griffoni, AlessioAlessioGriffoniThijs, StevenStevenThijsRuss, C.C.RussTrémouilles, DavidDavidTrémouillesScholz, MirkoMirkoScholzLinten, DimitriDimitriLintenCollaert, NadineNadineCollaertRooyackers, RitaRitaRooyackersDuvvury, C.C.DuvvuryGossner, H.H.GossnerMeneghesso, G.G.MeneghessoGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13815Impact of strain on ESD robustness of FinFET devicesProceedings paper