Solving the BEOL compatibility challenge of top-pinned magnetic tunnel junction stacks

Swerts, JohanJohanSwertsLiu, EnlongEnlongLiuCouet, SebastienSebastienCouetMertens, SofieSofieMertensRao, SiddharthSiddharthRaoKim, WoojinWoojinKimGarello, KevinKevinGarelloSouriau, LaurentLaurentSouriauKundu, ShreyaShreyaKunduCrotti, DavideDavideCrottiYasin, FarrukhFarrukhYasinJossart, NicoNicoJossartSakhare, SushilSushilSakhareDevolder, ThibautThibautDevolderVan Beek, SimonSimonVan BeekO'Sullivan, BarryBarryO'SullivanVan Elshocht, SvenSvenVan ElshochtFurnemont, ArnaudArnaudFurnemontKar, Gouri SankarGouri SankarKar2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29533Solving the BEOL compatibility challenge of top-pinned magnetic tunnel junction stacksProceedings paperhttp://ieeexplore.ieee.org/document/8268518/