A ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/III-V semiconductor Schottky barrier contacts by chemical pretreatments

Vanalme, G. M.G. M.VanalmeGoubert, L.L.GoubertVan Meirhaeghe, R. L.R. L.Van MeirhaegheCardon, F.F.CardonVan Daele, PeterPeterVan Daele2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3943A ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/III-V semiconductor Schottky barrier contacts by chemical pretreatmentsJournal article