A 2D analytical threshold voltage model for fully depleted short channel SOI MOSFET, inculding HALO

van Meer, HansHansvan MeerDe Meyer, KristinKristinDe Meyer2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4842A 2D analytical threshold voltage model for fully depleted short channel SOI MOSFET, inculding HALOProceedings paper