Rosenbusch, A.A.RosenbuschHourd, A.A.HourdJuffermans, C.C.JuffermansKirsch, H.H.KirschLalanne, F.F.LalanneMaurer, W.W.MaurerRomeo, C.C.RomeoRonse, KurtKurtRonseSchiavone, P.P.SchiavoneSimecek, M.M.SimecekToublan, O.O.ToublanWatson, J.J.WatsonZiegler, W.W.ZieglerZimmermann, R.R.Zimmermann2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2914New approach to optical proximity correctionProceedings paper