Performance and reliability of strained-silicon nMOSFETs with SiN cap layer

Giusi, G.G.GiusiCrupi, F.F.CrupiSimoen, EddyEddySimoenEneman, GeertGeertEnemanJurczak, GosiaGosiaJurczak2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12202Performance and reliability of strained-silicon nMOSFETs with SiN cap layerJournal article