Limitation of EUV single exposure on DRAM applications: learning and challenges

Liu, Shih-hsiangShih-hsiangLiuDardani, ZoiZoiDardaniZuurbier, NadiaNadiaZuurbierDhagat, ParulParulDhagatWang, ErikErikWangFallica, RobertoRobertoFallica2022-05-032022-05-022022-05-032022-06-15https://imec-publications.be/handle/20.500.12860/39726Limitation of EUV single exposure on DRAM applications: learning and challengesOral presentationEngineering