Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performance

Fruhauf, S.S.FruhaufHimcinschi, C.C.HimcinschiRennau, M.M.RennauSchulze, K.K.SchulzeSchulz, S.E.S.E.SchulzFriedrich, M.M.FriedrichGessner, T.T.GessnerZahn, D.R.T.D.R.T.ZahnLe, Quoc ToanQuoc ToanLeCaluwaerts, RudyRudyCaluwaerts2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10470Scaling down thickness of ULK materials for 65 node and below and its efect on electrical performanceJournal article