Wang, QingfengQingfengWangLauwers, AnneAnneLauwersDeweerdt, BrunoBrunoDeweerdtVerbeeck, RitaRitaVerbeeckMaex, KarenKarenMaex2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/1006Formation of deep submicrometer cobalt silicated poly gate using bilayer processesProceedings paper