Kesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullartMertens, PaulPaulMertens2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10686Effect of chemical solution on the stability of low-k filmsProceedings paper