Leys, FrederikFrederikLeysLiu, CongCongLiuShi, XiaopingXiaopingShiLamare, B.B.LamareTakeuchi, ShotaroShotaroTakeuchiSchaekers, MarcMarcSchaekersLoo, RogerRogerLooWoelk, E.E.WoelkCaymax, MattyMattyCaymax2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14019Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor depositionMeeting abstract