The ozone solubility and its decay in aqueous solutions: crucial issues in ozonated chemistries for semiconductor cleaning

De Smedt, FrankFrankDe SmedtDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5206The ozone solubility and its decay in aqueous solutions: crucial issues in ozonated chemistries for semiconductor cleaningProceedings paper