Efficient pore sealing crucial for future interconnects

Van Bavel, MiekeMiekeVan BavelBeyer, GeraldGeraldBeyerIacopi, FrancescaFrancescaIacopiAbell, ThomasThomasAbellShamiryan, DenisDenisShamiryanMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9704Efficient pore sealing crucial for future interconnectsJournal article