Meuris, MarcMarcMeurisVerhaverbeke, StevenStevenVerhaverbekeMertens, PaulPaulMertensSchmidt, HaraldHaraldSchmidtRotondaro, AntonioAntonioRotondaroHeyns, MarcMarcHeynsDepas, MichelMichelDepasPhilipossian, A.A.PhilipossianVatel, OliverOliverVatel2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/256The IMEC Clean concept : an advanced wafer cleaning technologyOral presentation