Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuHuygebaert, C.C.HuygebaertNauwelaerts, SophieSophieNauwelaertsVandervorst, WilfriedWilfriedVandervorstKimura, K.K.Kimura2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4151Advanced RBS analysis of thin films in micro-electronicsOral presentation