A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

Cacciato, AntonioAntonioCacciatoBreuil, LaurentLaurentBreuilDekkers, HaroldHaroldDekkersZahid, MohammedMohammedZahidKar, Gouri SankarGouri SankarKarEveraert, Jean-LucJean-LucEveraertSchoofs, GeertGeertSchoofsVan den Bosch, GeertGeertVan den BoschJurczak, GosiaGosiaJurczakDebusschere, IngridIngridDebusschereVan Houdt, JanJanVan HoudtCockburn, AndrewAndrewCockburnDate, LucienLucienDateXa, Li-QunLi-QunXaLe, MaggieMaggieLeLee, WonWonLee2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16816A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technologyProceedings paper