Lisoni, JuditJuditLisoniJohnson, JoJoJohnsonGoux, LudovicLudovicGouxParaschiv, VasileVasileParaschivMaes, DavidDavidMaesVander Meeren, HansHansVander MeerenWillegems, MyriamMyriamWillegemsHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersCaputa, C.C.CaputaZambrano, R.R.ZambranoTurquat, Ch.Ch.TurquatMuller, Ch.Ch.Muller2021-10-162021-10-162007-01https://imec-publications.be/handle/20.500.12860/12499Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structuresJournal article