Growth and processing defects in CMOS homo- and hetero-epitaxy

Simoen, EddyEddySimoenBargallo Gonzalez, MireiaMireiaBargallo GonzalezEneman, GeertGeertEnemanRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyKobayashi, DaisukeDaisukeKobayashiLoo, RogerRogerLooCaymax, MattyMattyCaymaxClaeys, CorCorClaeys2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19785Growth and processing defects in CMOS homo- and hetero-epitaxyProceedings paper