Yanovitskaya, Z.S.Z.S.YanovitskayaZverev, A.V.A.V.ZverevShamiryan, DenisDenisShamiryanMaex, KarenKarenMaex2021-10-152021-10-152003-11https://imec-publications.be/handle/20.500.12860/8428Simulations of diffusion barrier deposition on porous low-k filmsJournal article