Double patterning for 32-nm and below: an update

Finders, JoJoFindersDusa, MirceaMirceaDusaVleeming, BertBertVleemingHepp, BirgittBirgittHeppMegens, HenryHenryMegensMaenhoudt, MireilleMireilleMaenhoudtCheng, ShauneeShauneeChengVandeweyer, TomTomVandeweyer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13724Double patterning for 32-nm and below: an updateProceedings paper