Verstuyft, MattiMattiVerstuyftAkiki, EliasEliasAkikiDucournau, GuillaumeGuillaumeDucournauWalter, BenjaminBenjaminWalterFaucher, MarcMarcFaucherMairiaux, EstelleEstelleMairiauxLampin, Jean-FrançoisJean-FrançoisLampinVanwolleghem, MathiasMathiasVanwolleghemKuyken, BartBartKuyken2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34384Integrated photonic crystal cavity for terahertz waves on a free-standing silicon platformProceedings paper