Rochus, VeroniqueVeroniqueRochusJansen, RoelofRoelofJansenHaouari, RachidRachidHaouariFigeys, BrunoBrunoFigeysMukund, VigneshVigneshMukundVerhaegen, FabianFabianVerhaegenGoyvaerts, JeroenJeroenGoyvaertsNeutens, PieterPieterNeutensO'Callaghan, JohnJohnO'CallaghanStassen, AndimAndimStassenLenci, SilviaSilviaLenciRottenberg, XavierXavierRottenberg2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29308Modelling and design of micro-opto-mechanical pressure sensors in the presence of residual stressesProceedings paperhttp://ieeexplore.ieee.org/document/7926285/