San Andres Serrano, EnriqueEnriqueSan Andres SerranoPantisano, LuigiLuigiPantisanoRoussel, PhilippePhilippeRousselToledano Luque, MariaMariaToledano LuqueTrojman, LionelLionelTrojmanSeveri, SimoneSimoneSeveriDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12837High-k characterization by RFCVProceedings paper