Atomic layer deposition of Gd-doped HfO2 thin films

Adelmann, ChristophChristophAdelmannTielens, HildeHildeTielensDewulf, DaanDaanDewulfHardy, AnAnHardyPierreux, DieterDieterPierreuxSwerts, JohanJohanSwertsRosseel, ErikErikRosseelShi, XiaopingXiaopingShiVan Bael, MarliesMarliesVan BaelKittl, JorgeJorgeKittlVan Elshocht, SvenSvenVan Elshocht2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/16628Atomic layer deposition of Gd-doped HfO2 thin filmsJournal articlehttp://link.aip.org/link/?JES/157/G105