Process control of tungsten beta-phase window for spin-orbit torques MRAM applications

Vudya Sethu, Kiran KumarKiran KumarVudya SethuGhosh, SambitSambitGhoshCouet, SebastienSebastienCouetSwerts, JohanJohanSwertsSoree, BartBartSoreeDe Boeck, JoJoDe BoeckKar, Gouri SankarGouri SankarKarGarello, KevinKevinGarello2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32233Process control of tungsten beta-phase window for spin-orbit torques MRAM applicationsOral presentationhttps://jems2018.org/files/boa/JEMS2018_BookOfAbstracts_PosterSessionC.pdf