Multilayer inorganic electrets with SiO2 and Si3N4 layers for applications on heated machinery

Leonov, VladimirVladimirLeonovVan Hoof, ChrisChrisVan Hoof2021-10-202021-10-202012-052090-357Xhttps://imec-publications.be/handle/20.500.12860/21002Multilayer inorganic electrets with SiO2 and Si3N4 layers for applications on heated machineryJournal article