Mitard, JeromeJeromeMitardDe Jaeger, BriceBriceDe JaegerLeys, FrederikFrederikLeysHellings, GeertGeertHellingsMartens, KoenKoenMartensEneman, GeertGeertEnemanBrunco, DavidDavidBruncoLoo, RogerRogerLooShamiryan, DenisDenisShamiryanVandeweyer, TomTomVandeweyerWinderickx, GillisGillisWinderickxVrancken, EviEviVranckenDe Meyer, KristinKristinDe MeyerCaymax, MattyMattyCaymaxPantisano, LuigiLuigiPantisanoMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14176Record Ion/Ioff performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalabilityProceedings paper