Waeterloos, JoostJoostWaeterloosMeynen, HermanHermanMeynende Potter de ten Broeck, MurielMurielde Potter de ten BroeckCoenegrachts, BartBartCoenegrachtsGao, TengTengGaoGrillaert, JoostJoostGrillaertVan den hove, LucLucVan den hoveMaex, KarenKarenMaex2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1645Reduction of the premetal dielectric thermal budget for a 0.35 μm technologyProceedings paper