Zhao, ChaoChaoZhaoRoebben, G.G.RoebbenHeyns, MarcMarcHeynsVan Der Biest, O.O.Van Der Biest2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7101Crystallisation and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin filmsProceedings paper