Epitaxial growth of hexagonal theta-nickel silicide on (001) Si

Verleysen, EvelineEvelineVerleysenBender, HugoHugoBenderRichard, OlivierOlivierRichardSchryvers, NickNickSchryversDe Keyser, KoenKoenDe KeyserDetavernier, ChristopheChristopheDetavernierVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18280Epitaxial growth of hexagonal theta-nickel silicide on (001) SiProceedings paper