Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterCherman, VladimirVladimirChermanCzarnecki, PiotrPiotrCzarneckiLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzThijs, StevenStevenThijsGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17934Behavior of RF MEMS switches under ESD stressProceedings paper