Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Wu, MeiyiMeiyiWude Marneffe, Jean-FrancoisJean-Francoisde MarneffeOpsomer, KarlKarlOpsomerDetavernier, ChristopheChristopheDetavernierDelabie, AnneliesAnneliesDelabieNaujok, PhilippPhilippNaujokCaner, OezgeOezgeCanerGoodyear, AndyAndyGoodyearCooke, MikeMikeCookeSaadeh, QaisQaisSaadehSoltwisch, VictorVictorSoltwischScholze, FrankFrankScholzePhilipsen, VickyVickyPhilipsen2022-03-042022-03-0420212590-0072WOS:000686134600002https://imec-publications.be/handle/20.500.12860/39307Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n maskJournal article10.1016/j.mne.2021.100089WOS:000686134600002