Tsutsue, MakotoMakotoTsutsueTravaly, YoussefYoussefTravalyIkeda, AtsushiAtsushiIkedaTokei, ZsoltZsoltTokeiWillegems, MyriamMyriamWillegemsStruyf, HerbertHerbertStruyfSinapi, FabriceFabriceSinapiRichard, OlivierOlivierRichardKemeling, NathanNathanKemelingDe Roest, DavidDavidDe RoestFukuzawa, A.A.FukuzawaMatsuki, N.N.MatsukiSprey, HesselHesselSpreyBeyer, GeraldGeraldBeyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13002Highly reliable Cu/ULK integratrion scheme using MHM and low-k capping filmOral presentation