Extension of a multilayer interconnection technology in MCM-Si with opto-electronic facilities

De Pauw, HerbertHerbertDe PauwDe Smet, HerbertHerbertDe SmetVanfleteren, JanJanVanfleterenLernout, JoJoLernoutVan Calster, AndreAndreVan Calster2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4270Extension of a multilayer interconnection technology in MCM-Si with opto-electronic facilitiesJournal article