Pantouvaki, MariannaMariannaPantouvakiZhao, LarryLarryZhaoHuffman, CraigCraigHuffmanHeylen, NancyNancyHeylenOno, YukiharuYukiharuOnoNakajima, MichioMichioNakajimaNakatani, KojiKojiNakataniBeyer, GeraldGeraldBeyerBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17760Advanced organic polymers for the aggressive scaling of low-k materialsProceedings paper