Low temperature effect on strained and relaxed Ge pFinFETs STI last processes

Oliveira, AlbertoAlbertoOliveiraSimoen, EddyEddySimoenAgopian, Paula G.D.Paula G.D.AgopianMartino, Joao A.Joao A.MartinoMitard, JeromeJeromeMitardWitters, LiesbethLiesbethWittersCollaert, NadineNadineCollaertThean, AaronAaronTheanClaeys, CorCorClaeys2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27094Low temperature effect on strained and relaxed Ge pFinFETs STI last processesProceedings paperhttp://ecst.ecsdl.org/content/75/4/213.abstract