Ray Chaudhuri, AsheshAsheshRay ChaudhuriSeveri, SimoneSimoneSeveriHelin, PhilippePhilippeHelinFrancis, LaurentLaurentFrancisTilmans, HarrieHarrieTilmans2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27196Challenges of monolithic integration for SiGe MEMS TechnologyProceedings paperhttp://ieeexplore.ieee.org/document/7808583/