Extraction of Roughness Measurements from Thin Resists with Low Signal-to-Noise-Ratio (SNR) SEM Images by Applying Deep Learning Denoiser

Zidan, MohamedMohamedZidanDey, BappadityaBappadityaDeyDe Simone, DaniloDaniloDe SimoneSeveri, JorenJorenSeveriCharley, Anne-LaureAnne-LaureCharleyHalder, SandipSandipHalderLeray, PhilippePhilippeLerayDe Gendt, StefanStefanDe GendtLorusso, GianGianLorusso2023-04-122023-03-222023-03-242023-04-1220220277-786XWOS:000944102600017https://imec-publications.be/handle/20.500.12860/41333Extraction of Roughness Measurements from Thin Resists with Low Signal-to-Noise-Ratio (SNR) SEM Images by Applying Deep Learning DenoiserProceedings paper10.1117/12.2643315978-1-5106-5640-6WOS:000944102600017MODEL