Ohmic contacts with ultra-low optical loss on heavily doped n-type InGaAs and InGaAsP for InP-based photonic membranes

Shen, L.L.Shenvan Veldhoven, P.J.P.J.van VeldhovenJiao, Y.Y.JiaoDolores-Calzadilla, V.V.Dolores-Calzadillavan de Tol, J.J.G.M.J.J.G.M.van de TolRoelkens, GuntherGuntherRoelkensSmit, M.K.M.K.Smit2021-10-232021-10-232016-021943-0655https://imec-publications.be/handle/20.500.12860/27300Ohmic contacts with ultra-low optical loss on heavily doped n-type InGaAs and InGaAsP for InP-based photonic membranesJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7397876