A low-power HKMG CMOS platform compatible with DRAM node 2x and beyond

Ritzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramSpessot, AlessioAlessioSpessotCaillat, ChristianChristianCaillatAoulaiche, MarcMarcAoulaicheCho, Moon JuMoon JuChoNoh, Kyung BongKyung BongNohSon, YunikYunikSonNa, Hoon JoHoon JoNaKauerauf, ThomasThomasKaueraufDouhard, BastienBastienDouhardNazir, AftabAftabNazirChew, Soon AikSoon AikChewMilenin, AlexeyAlexeyMileninAltamirano Sanchez, EfrainEfrainAltamirano SanchezSchoofs, GeertGeertSchoofsAlbert, JohanJohanAlbertSebaai, FaridFaridSebaaiVecchio, EmmaEmmaVecchioParaschiv, VasileVasileParaschivVandervorst, WilfriedWilfriedVandervorstLee, Sun GhilSun GhilLeeCollaert, NadineNadineCollaertFazan, PierrePierreFazanHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-222021-10-2220140018-9383https://imec-publications.be/handle/20.500.12860/24434A low-power HKMG CMOS platform compatible with DRAM node 2x and beyondJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6847699&contentType=Journals+%26+Magazines