Spessot, AlessioAlessioSpessotRitzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramAoulaiche, MarcMarcAoulaicheCho, Moon JuMoon JuChoToledano Luque, MariaMariaToledano LuqueFazan, PierrePierreFazan2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25934Advanced doping techniques for DRAM peripheral MOSFETsMeeting abstract