Sah, KaushikKaushikSahDas, SayantanSayantanDasLi, S.S.LiBeral, C.C.BeralCross, A.A.CrossHalder, SandipSandipHalder2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35871Massive metrology for process development and monitoring applicationsProceedings paperhttps://doi.org/10.1117/12.2553092