Meuris, MarcMarcMeurisDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtKubicek, StefanStefanKubicekVerheyen, PeterPeterVerheyenDe Jaeger, BriceBriceDe JaegerVan Steenbergen, JanJanVan SteenbergenWinderickx, GillisGillisWinderickxVan Moorhem, ElsElsVan MoorhemPurunen, RiikkaRiikkaPurunenBrijs, BertBertBrijsCaymax, MattyMattyCaymaxConard, ThierryThierryConardRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstZhao, ChaoChaoZhaoDe Gendt, StefanStefanDe GendtSchram, TomTomSchramChiarella, ThomasThomasChiarellaOnsia, BartBartOnsiaTeerlinck, IITeerlinckMertens, PaulPaulMertensRaskin, GGRaskinMijlemans, PPMijlemansBiesemans, SergeSergeBiesemansHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9301The future of high-k on pure germanium and its importance for Ge CMOSProceedings paper