Kusnadi, IrIrKusnadiDo, ThuyThuyDoGranik, YuriYuriGranikSturtevant, John L.John L.SturtevantDe Bisschop, PeterPeterDe BisschopHibino, DaisukeDaisukeHibino2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17414Contour-based self-aligning calibration of OPC modelsProceedings paper