Scaling of BTI reliability in presence of Time-zero Variability – Pathfinding from planar FET to advanced 3-D FinFET nodes

Kukner, HalilHalilKuknerWeckx, PieterPieterWeckxFranco, JacopoJacopoFrancoToledano Luque, MariaMariaToledano LuqueCho, Moon JuMoon JuChoKaczer, BenBenKaczerRaghavan, PraveenPraveenRaghavanJang, DoyoungDoyoungJangMiyaguchi, KenichiKenichiMiyaguchiGarcia Bardon, MarieMarieGarcia BardonCatthoor, FranckyFranckyCatthoorVan der Perre, LiesbetLiesbetVan der PerreLauwereins, RudyRudyLauwereinsGroeseneken, GuidoGuidoGroeseneken2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24075Scaling of BTI reliability in presence of Time-zero Variability – Pathfinding from planar FET to advanced 3-D FinFET nodesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6861122&contentType=Conference+Publications