Cellere, G.G.CellerePantisano, LuigiLuigiPantisanoValentini, M. G.M. G.ValentiniPaccagnella, A.A.Paccagnella2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5129Depassivation of latent plasma damage in nMOSFETsJournal article