Gupta, AnshulAnshulGuptaRadisic, DunjaDunjaRadisicMaes, J.W.J.W.MaesVarela Pedreira, OlallaOlallaVarela PedreiraSoulie, Jean-PhilippeJean-PhilippeSoulieJourdan, NicolasNicolasJourdanMertens, HansHansMertensBandyopadhyay, SudipSudipBandyopadhyayLe, Quoc ToanQuoc ToanLePacco, AntoineAntoinePaccoHeylen, NancyNancyHeylenVandersmissen, KevinKevinVandersmissenDevriendt, KatiaKatiaDevriendtZhu, C.C.ZhuDatta, S.S.DattaSebaai, FaridFaridSebaaiWang, S.S.WangMousa, M.M.MousaLee, J.J.LeeGeypen, JefJefGeypenDe Wachter, BartBartDe WachterChehab, BilalBilalChehabSalahuddin, Shairfe MuhammadShairfe MuhammadSalahuddinMurdoch, GayleGayleMurdochBiesemans, SergeSergeBiesemansTokei, ZsoltZsoltTokeiDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2022-08-252022-07-092022-08-2520212380-9248WOS:000812325400185https://imec-publications.be/handle/20.500.12860/40073Buried Power Rail Metal exploration towards the 1 nm NodeProceedings paper10.1109/IEDM19574.2021.9720684978-1-6654-2572-8WOS:000812325400185