Baker, DanielDanielBakerOp de Beeck, MaaikeMaaikeOp de BeeckBotermans, HarryHarryBotermansVan den hove, LucLucVan den hove2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1716Manufacturable DUV lithography processes for 0.25 μm technology contact and via layersJournal article