Popovici, Mihaela IoanaMihaela IoanaPopoviciSwerts, JohanJohanSwertsTomida, KazuyukiKazuyukiTomidaKim, Min-SooMin-SooKimDelabie, AnneliesAnneliesDelabieMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetKaczer, BenBenKaczerJurczak, GosiaGosiaJurczakVan Elshocht, SvenSvenVan Elshocht2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21327Scalability of ALD strontium titanate filmsMeeting abstract