Stochastic effects and resist variability in high resolution lithography

Vaglio Pret, AlessandroAlessandroVaglio PretGaridis, K.K.GaridisGronheid, RoelRoelGronheidBiafore, JohnJohnBiafore2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21657Stochastic effects and resist variability in high resolution lithographyOral presentation